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Tag:StdVol-Materials
Tag:StdVol-Materials
M01000 - SEMI M10 - Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers
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M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers
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M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers
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M01300 - SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers
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M01600 - SEMI M16 - 多結晶シリコンの仕様
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M01600 - SEMI M16 - Specification for Polycrystalline Silicon
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M01700 - SEMI M17 - 一般的なウェーハグリッドのガイド
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M01700 - SEMI M17 - Guide for a Universal Wafer Grid
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M02000 - SEMI M20 - Practice for Establishing a Wafer Coordinate System
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M02100 - SEMI M21 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array
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M02300 - SEMI M23 - Specification for Polished Monocrystalline Indium Phosphide Wafers
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M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
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M03500 - SEMI M35 - 自動検査により検出されるシリコンウェーハ表面特性の仕様を開発するためのガイド
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M03500 - SEMI M35 - Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection
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M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers
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M04000 - SEMI M40 - シリコンウェーハ表面のラフネス測定のガイド
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M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers
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M04100 - SEMI M41 - Specification of Silicon-on-Insulator (SOI) for Power Device/ICs
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