M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers : Standards semi.org : Standards|Women|Men|Denim & Pants|Skin

M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers

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M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers

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Model: 9503
Tags: Lang-English StdDcs-Inactive StdTier-Tier0 StdTpc-Gallium Arsenide StdVol-Materials

Revision:

SEMI M15-0298 - Inactive

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Description: This document defines the maximum number of defects, by type, that an acceptable polished Semi-Insulating Gallium Arsenide (GaAs) wafer may exhibit.
　
Referenced SEMI Standards
None.
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