The purpose of this Specification is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers, in order to improve the consistency of wafer marking and allow simplification of the performance requirement of automatic optical character recognition (OCR) equipment.

This Specification defines the geometric and spatial limits of the alphanumeric code, specifically for nominally round, flatted or notched compound semiconductor wafers. It also defines the basic code used to characterize the individual wafer, thereby providing practical operator interpretation. This Specification does not address the marking techniques that may be employed when complying with this Standard nor does it address any health issues associated with those techniques.

Referenced SEMI Standards (purchase separately)
SEMI M12 — Specification for Serial Alphanumeric Marking of the Front Surface of Wafers

Revision History
SEMI T5-1022 (technical revision)
SEMI T5-1214 (technical revision)
SEMI T5-1106 (Reapproved 1111)
SEMI T5-1106 (technical revision)
SEMI T5-0706 (technical revision)
SEMI T5-96 (Reapproved 1104)
SEMI T5-96E (editorial revision)
SEMI T5-95 (first published)