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Tag:StdVol-Silicon Materials & Process Control
Tag:StdVol-Silicon Materials & Process Control
MF213900 - SEMI MF2139 - Test Method for Measuring Nitrogen Concentration in Silicon Substrates by Secondary Ion Mass Spectrometry
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0.19
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MF002600 - SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal
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MF002800 - SEMI MF28 - Test Method for Minority Carrier Lifetime in Bulk Germanium and Silicon by Measurement of Photoconductivity Decay
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MF037400 - SEMI MF374 - Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure
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MF039100 - SEMI MF391 - Test Method for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-State Surface Photovoltage
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MF039700 - SEMI MF397 - Test Method for Resistivity of Silicon Bars Using a Two-Point Probe
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MF004200 - SEMI MF42 - Test Method for Conductivity Type of Extrinsic Semiconducting Materials
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MF004300 - SEMI MF43 - Test Method for Resistivity of Semiconductor Materials
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MF052300 - SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces
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MF052500 - SEMI MF525 - Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe
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0.19
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MF053300 - SEMI MF533 - Test Method for Thickness and Thickness Variation of Silicon Wafers
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MF057600 - SEMI MF576 - Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
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MF067100 - SEMI MF671 - Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
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MF067200 - SEMI MF672 - Guide for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe
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MF067300 - SEMI MF673 - Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gauge
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MF067400 - SEMI MF674 - Practice for Preparing Silicon for Spreading Resistance Measurements
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MF072300 - SEMI MF723 - Practice for Conversion Between Resistivity and Dopant or Carrier Density for Boron-Doped, Phosphorous-Doped, and Arsenic-Doped Silicon
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MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements
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